ZPS™ Absolute Position Sensors

Zygo Corporation

ZYGO's new ZPS™ system measures absolute position using ultra-compact optical sensors that are easily integrated into high-precision applications such as deformable mirrors and lens positioning. The optical sensor system provides up to 64 synchronized channels of high-precision, non-contact, absolute position measurement over a range of 1.2 mm. Measurement resolution is 0.01 nm with ≤ 1 nm/day measurement stability. The optical sensors do not generate heat and are insensitive to electromagnetic interference, making the ZPS system ideal for high-precision applications that may be affected by these factors.