FlexCam Metrology Module

4D Technology Corporation

The Prism Award winning FlexCam provides high resolution 3D metrology in a highly compact package. FlexCam can be used as an affordable, stand-alone solution for in situ measurement of surface roughness or defects on large optics. Its ability to scan large areas and accumulate statistics over the entire surface provides unparalleled surface quality data. For flexible electronics, FlexCam enables real-time monitoring and control of roughness to less than 0.5nm rms. FlexCam also identifies and quantifies defects, registering their position within the roll. Multiple defect statistics are calculated including area, volume, depth and slope.