Imaging spectrometer for vacuum ultraviolet (VUV)

McPherson

With a carefully adjusted aperture in the optical path, McPHERSON spectrometers now measure vertical spatial profile in addition to dispersed wavelengths. They operate in the vacuum ultraviolet (VUV) and can, for example, view plasma impurity emission lines in the wavelength range of 30 to 320 nanometers. The three meter system reports: Simultaneous wavelengths measured in a single discharge, about 3.7nm. With entrance slit width 0.02-millimeters, users can achieve 15.3-picometer spectral resolution FWHM. The vertical observation range is tailored to different heights with a convex mirror. Doing so enables edge profile measurement and full profile measurements that cover entire vertical plasma.

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McPherson is a manufacturer of scientific instruments, with over 60 years’ of experience. We specialize in high performance spectrometers and purpose built spectroscopy systems. We also know the soft x-ray and vacuum ultraviolet region and provide related state of the art components and services. Our optimized spectrometers are for wavelengths from 1 nanometer to 20 microns and energies from 0.05 eV up to 2 keV.
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