Zygo Corporation is a worldwide supplier of optical metrology instruments, high precision optical components, and complex electro-optical system design and manufacturing services. We strive to enable customer success by delivering innovative precision optical and metrology solutions.
ZYGO Verifire™ XL Laser Interferometer
The Verifire™ XL interferometer is a stand-alone workstation designed for simplistic and reliable metrology of large flat surfaces up to twelve inches (300 mm) in diameter. Examples include front-surface reflectors, windows, and semiconductor wafers or wafer chucks.
This fully integrated system is easy to use, with a heavy duty tip/tilt stage that provides repeatable part placement without the need for custom fixturing. The compact footprint, with built-in vibration isolation, requires minimal production floor space.